A new low consumption 3D compass using integrated magnets and piezoresistive nano-gauges

Author

Ettelt, D. ; Rey, P. ; Savoye, M. ; Coutier, C. ; Cartier, M. ; Redon, O. ; Audoin, M. ; Walther, A. ; Robert, P. ; Zhang, Y. ; Dumas-Bouchiat, F. ; Dempsey, N.M. ; Delamare, J.

Author_Institution

LETI, CEA, Grenoble, France

fYear

2011

fDate

5-9 June 2011

Firstpage

40

Lastpage

43

Abstract

We present for the first time a new concept for low-cost fabrication of a monolithic 3-axis MEMS compass using integrated permanent magnets and based on a technology compatible with inertial MEMS sensors. Piezoresistive gauges of nanometric scale enable to reduce the sensor size without sensitivity loss. Magnetometers were designed for sensitivities of 9V/T and resolutions less than 10nT/√Hz at a bridge current of 100μA and with an active surface of typically 200μm × 300μm. Ultra-low power consumption below 10μW can be achieved. First demonstrators have shown the good reliability of the concept and are in good agreement with design.

Keywords

compasses; gauges; magnetometers; microfabrication; microsensors; permanent magnets; piezoresistive devices; reliability; current 100 muA; inertial MEMS sensor; integrated permanent magnet; low-cost fabrication; magnetometer; monolithic 3-axis MEMS compass; nanometric scale; piezoresistive gauge; reliability; Magnetic fields; Magnetic sensors; Magnetometers; Micromechanical devices; Sensitivity; Silicon; 3D Compass; integrated magnets; piezoresistive nano-gauges;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969128

Filename

5969128