A new N/MEMS-based nonvolatile circuit

This paper reports a new concept of a non-volatile circuit implemented by using nano/microelectro-mechanical system (N/MEMS). The proposed circuit can memorize its previous states with no power consumption when it is frozen by the disconnection of power. When re-powered, the circuit wakes up instantly and can continue the operation because it still holds the previous states. Demonstration was successfully done with a simple MEMS inverter. The logic state was maintained for less than 50sec in an air ambient due to the ambient leakage of charges, however, in a vacuum ambient (<;40mTorr), the state lasted over 10⁵ sec without power.