A new N/MEMS-based nonvolatile circuit

Author

Yang, Hyun-Ho ; Ko, Seung-Deok ; Lee, Jeong-Oen ; Yoon, Jun-Bo

Author_Institution

Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea

fYear

2011

fDate

5-9 June 2011

Firstpage

52

Lastpage

55

Abstract

This paper reports a new concept of a non-volatile circuit implemented by using nano/microelectro-mechanical system (N/MEMS). The proposed circuit can memorize its previous states with no power consumption when it is frozen by the disconnection of power. When re-powered, the circuit wakes up instantly and can continue the operation because it still holds the previous states. Demonstration was successfully done with a simple MEMS inverter. The logic state was maintained for less than 50sec in an air ambient due to the ambient leakage of charges, however, in a vacuum ambient (<;40mTorr), the state lasted over 10⁵ sec without power.

Keywords

invertors; microswitches; nanoelectromechanical devices; random-access storage; MEMS inverter; MEMS-based nonvolatile circuit; NEMS-based nonvolatile circuit; charge ambient leakage; microelectromechanical system-based nonvolatile circuit; nanoelectromechanical system-based nonvolatile circuit; power consumption; power disconnection; Copper; Inverters; Micromechanical devices; Microswitches; Nonvolatile memory; Substrates; Voltage measurement; NEMS/MEMS logic; NEMS/MEMS switch; Non-volatile circuit;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969132

Filename

5969132