Title :
Reversible nano-lithography between materials
Author :
Jae Hong Park ; Hyun Ik Jang ; Jun Yong Park ; Dong Eon Lee ; Seok Woo Jeon ; Woo Choong Kim ; Hee Yeoun Kim ; Chi Won Ahn
Author_Institution :
Korea Nat. NanoFab Center, South Korea
Abstract :
The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro- or nano-scale sensors and actuators.
Keywords :
nanolithography; biochips; biological devices; biomimetic devices; display devices; energy devices; energy harvesters; fuel cells; hard polymer; metal; nanostructures; optical devices; photonic components; physical devices; reversible nanolithography; secondary batteries; soft polymer; solar cells; Nanobioscience; Nanoscale devices; Nanostructured materials; Nanostructures; Polymers; Silicon;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
Conference_Location :
Waikiki Beach, HI
DOI :
10.1109/NEMS.2014.6908871