• DocumentCode
    252878
  • Title

    Reversible nano-lithography between materials

  • Author

    Jae Hong Park ; Hyun Ik Jang ; Jun Yong Park ; Dong Eon Lee ; Seok Woo Jeon ; Woo Choong Kim ; Hee Yeoun Kim ; Chi Won Ahn

  • Author_Institution
    Korea Nat. NanoFab Center, South Korea
  • fYear
    2014
  • fDate
    13-16 April 2014
  • Firstpage
    549
  • Lastpage
    550
  • Abstract
    The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro- or nano-scale sensors and actuators.
  • Keywords
    nanolithography; biochips; biological devices; biomimetic devices; display devices; energy devices; energy harvesters; fuel cells; hard polymer; metal; nanostructures; optical devices; photonic components; physical devices; reversible nanolithography; secondary batteries; soft polymer; solar cells; Nanobioscience; Nanoscale devices; Nanostructured materials; Nanostructures; Polymers; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
  • Conference_Location
    Waikiki Beach, HI
  • Type

    conf

  • DOI
    10.1109/NEMS.2014.6908871
  • Filename
    6908871