Title :
Prototyping capacitive-micro-ultrasonic transducers
Author :
Fu-Shin Lee ; Shao-Chin Tseng
Author_Institution :
Mechatron. Eng. Dept., Huafan Univ., Taipei, Taiwan
Abstract :
Capacitive-micro-ultrasonic transducers (CMUT) are considered as prospective probes to replace traditional piezoelectric transducers for high frequency ultrasonic imaging. DC bias voltages are commonly employed to improve their signal/noise ratios and sensitivities. Since expansion limits of CMUT membranes are confined by the bias voltages, bias effects for CMUT devices are investigated and modeled in this research. Also, this research carries out fabrications based upon MEMS processes to prototype the CMUT devices, and describes the manufacturing procedures systematically.
Keywords :
capacitive sensors; microsensors; piezoelectric transducers; probes; ultrasonic transducers; CMUT device; CMUT membrane; DC bias voltage; MEMS process; bias effect; capacitive-microultrasonic transducer; expansion limit; high frequency ultrasonic imaging; piezoelectric transducer; prospective probe; signal-noise ratio; Acoustics; Electrodes; Fabrication; Impedance; Prototypes; Transducers; Ultrasonic imaging; CMUT; bias voltage; equivalent model; fabrication;
Conference_Titel :
Computational Intelligence and Cybernetics (CyberneticsCom), 2012 IEEE International Conference on
Conference_Location :
Bali
Print_ISBN :
978-1-4673-0891-5
DOI :
10.1109/CyberneticsCom.2012.6381623
