Title :
Compact electrode design for in-plane accelerometer on SOI with refilled isolation trench
Author :
Xie, Jin ; Agarwal, Rahul ; Liu, Youhe ; Tsai, Julius Minglin ; Ranganathan, Nagarajan
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity and low damping coefficient.
Keywords :
accelerometers; electrodes; isolation technology; microsensors; silicon-on-insulator; SOI; Si; compact electrode design; damping coefficient; in-plane capacitive accelerometer; refilled isolation trench; silicon-on-insulator; Accelerometers; Capacitance; Capacitors; Damping; Electrodes; Sensitivity; Sensors; Accelerometer; SOI; capacitive; isolation trench;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969139
