DocumentCode
2528811
Title
Compact electrode design for in-plane accelerometer on SOI with refilled isolation trench
Author
Xie, Jin ; Agarwal, Rahul ; Liu, Youhe ; Tsai, Julius Minglin ; Ranganathan, Nagarajan
Author_Institution
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear
2011
fDate
5-9 June 2011
Firstpage
76
Lastpage
79
Abstract
A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity and low damping coefficient.
Keywords
accelerometers; electrodes; isolation technology; microsensors; silicon-on-insulator; SOI; Si; compact electrode design; damping coefficient; in-plane capacitive accelerometer; refilled isolation trench; silicon-on-insulator; Accelerometers; Capacitance; Capacitors; Damping; Electrodes; Sensitivity; Sensors; Accelerometer; SOI; capacitive; isolation trench;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969139
Filename
5969139
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