Title :
Read-disturb degradation mechanism due to electron trapping in the tunnel oxide for low-voltage flash memories
Author :
Kato, M. ; Miyamoto, N. ; Kume, H. ; Satoh, A. ; Adachi, T. ; Ushiyama, M. ; Kimura, K.
Author_Institution :
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
Abstract :
This paper describes the degradation of read-disturb characteristics related to time-dependent current caused by electron trapping in tunnel-oxide film. The time-dependent current, rather than the stress-induced leakage current, affects the threshold-voltage shift in memory cells with relatively thick tunnel oxide (>7 nm) and long disturbance time. Programming and erase endurance affects read disturb such that the read-disturb lifetime is improved in memory cells with nitrided oxide which exhibit long-endurance characteristics.<>
Keywords :
EPROM; PLD programming; electron traps; integrated memory circuits; 7 nm; electron trapping; erase endurance; low-voltage flash memories; memory cells; nitrided oxide; programming; read-disturb degradation mechanism; read-disturb lifetime; threshold-voltage shift; time-dependent current; tunnel oxide; Capacitors; Degradation; Electron traps; Flash memory; Laboratories; Leakage current; Nonvolatile memory; Stress; Threshold voltage; Tunneling;
Conference_Titel :
Electron Devices Meeting, 1994. IEDM '94. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-2111-1
DOI :
10.1109/IEDM.1994.383470