A flexible integrated micromachined hot-film sensor array for measuring surface flow vector

Author

Que, R.Y. ; Zhu, R. ; Wei, Q.Z. ; Cao, Z.

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

2011

fDate

5-9 June 2011

Firstpage

108

Lastpage

111

Abstract

This paper reports a flexible micromachined integrated hot-film sensor array for measuring flow vector around object surfaces, such as on aircrafts and vessels. The flow sensing elements and electric wiring are fabricated directly on a flexible polyimide Printed Circuit Board (PCB) by incorporating standard printed circuit techniques with micromachining techniques. Three micro hot-film elements are integrated, and tailor-designed to implement the measurements for detecting local surface flow vector in a directional range of 180°. The theoretical and experimental verifications on the new method are presented.

Keywords

flexible electronics; flow measurement; flow sensors; micromachining; printed circuits; sensor arrays; thin film sensors; PCB; electric wiring; flexible micromachined integrated hot-film sensor array; flexible polyimide printed circuit board; flow sensing element; micro hot-film element; surface flow vector measurement; Fluid flow measurement; Gold; Skin; Hot-film sensor array; flexible; surface flow vector;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969149

Filename

5969149