DocumentCode :
2529013
Title :
Micromechanical magnetometers based on clamped-clamped high-Q nonlinear resonators
Author :
Antonio, D. ; López, D.
Author_Institution :
Center for Nanoscale Mater., Argonne Nat. Lab., Argonne, IL, USA
fYear :
2011
fDate :
5-9 June 2011
Firstpage :
2851
Lastpage :
2854
Abstract :
We present a new type of magnetic field detector that uses a nonlinear micromechanical oscillator for sensing. This is the first fabricated magnetometer that takes advantage of the geometrically induced nonlinearities in a clamped-clamped beam. It does not incorporate magnetic materials, and its fabrication is fully compatible with standard semiconductor processes. In this sensor, the magnetic field B applied to the resonant beam can be detected by measuring the shift that it produces in fpeak, the frequency of maximum oscillation amplitude. This frequency shift is linked to a reduction of the quality factor and only occurs if the oscillator is in the nonlinear regime. It is originated by the ohmic losses induced by the applied magnetic field, which dissipate part of the mechanical energy stored in the oscillator.
Keywords :
Q-factor; beams (structures); clamps; magnetic sensors; magnetometers; micromechanical resonators; microsensors; oscillators; clamped-clamped high-Q nonlinear resonator; magnetic field detector; mechanical energy; micromechanical magnetometer; nonlinear micromechanical oscillator; quality factor; resonant beam; Force; Frequency measurement; Magnetic fields; Magnetometers; Oscillators; Q factor; Resonant frequency; MEMS; Nonlinear resonator; magnetometer;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
ISSN :
Pending
Print_ISBN :
978-1-4577-0157-3
Type :
conf
DOI :
10.1109/TRANSDUCERS.2011.5969150
Filename :
5969150
Link To Document :
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