Title :
Single chip flow sensing system with a dynamic flow range of more than 4 decades
Author :
Lammerink, T.S.J. ; Lötters, J.C. ; Wiegerink, R.J. ; Groenesteijn, J. ; Haneveld, J.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
Keywords :
flow sensors; micromachining; microsensors; microCoriolis flow sensor; micromachined single chip flow sensing; single chip flow sensing system; ultrawide dynamic flow range; Dynamic range; Electron tubes; Fluid flow measurement; Semiconductor device measurement; Silicon; Thermal sensors; Coriolis flow sensors; Integrated microsystems; surface channel technology; thermal flow sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969158
