Titanium Materials for UHV/XHV Systems

Author

Ishizawa, K. ; Kurisu, H. ; Yamamoto, S. ; Matsuura, M. ; Nomura, T. ; Murashige, N. ; Morimoto, T. ; Hesaka, M.

Author_Institution

Graduate Sch. of Sci. & Eng., Yamaguchi Univ.

Volume

2

fYear

2006

fDate

25-29 Sept. 2006

Firstpage

805

Lastpage

808

Abstract

Outgassing properties and surface profiles of titanium materials have been investigated in this paper. Titanium materials showed excellent outgassing rates below 10^-12 Pams^-1 after baking process. These values are two orders of magnitude smaller than that for standard vacuum materials under the same pre-baking condition. Outgassing rates of the pure titanium of JIS grade 2, titanium alloy, KS100, are about 1/4 of that for a stainless steel without baking process. Titanium materials are applicable for the vacuum chamber and vacuum components. The vacuum equipment made of the titanium material has excellent vacuum performance, e.g., very quick evacuation and UHV/XHV pressures are easily obtainable

Keywords

outgassing; stainless steel; surface structure; titanium alloys; KS100; UHV/XHV systems; baking process; outgassing properties; stainless steel; surface profiles; titanium materials; vacuum chamber; Atomic force microscopy; Building materials; Rough surfaces; Steel; Surface morphology; Surface roughness; Surface treatment; Temperature; Titanium alloys; Vacuum systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on

Conference_Location

Matsue

ISSN

1093-2941

Print_ISBN

1-4244-0191-7

Electronic_ISBN

1093-2941

Type

conf

DOI

10.1109/DEIV.2006.357425

Filename

4195006