DocumentCode :
2529250
Title :
Single-step fabrication of organic nanofibrous membrane for piezoelectric vibration sensor
Author :
Zheng, G.F. ; Wang, X. ; Li, W.W. ; Lei, T.P. ; Tao, W. ; Du, J. ; Qiu, Q.Y. ; Chi, X.G. ; Sun, D.H.
Author_Institution :
Dept. of Mech. & Electr. Eng., Xiamen Univ., Xiamen, China
fYear :
2011
fDate :
5-9 June 2011
Firstpage :
2782
Lastpage :
2785
Abstract :
A modified electrospinning setup with parallel electrode and heater plate was presented to fabricate piezoelectric nanofibrous membrane directly. Thanks to the strong electric field strength, high stretch ratio and high environmental temperature during the electrospinning process, α-phase poly (vinylidene fluoride) (PVDF) would be transformed to β-phase well and have excellent piezoelectric performance. The maximal piezoelectric output voltage increased from 100 mV to 300 mV with increasing excitation frequency from 5 Hz to 1000 Hz, and the noise in the piezoelectric response decreased with increasing excitation frequency. This work would promote the application of polymeric sensor in the NEMS/MEMS system integration.
Keywords :
electrodes; electrospinning; microfabrication; microsensors; nanofabrication; nanosensors; piezoelectric devices; vibrations; NEMS-MEMS system integration; electric field strength; frequency 5 Hz to 1000 Hz; heater plate; modified electro spinning setup; organic nanofibrous membrane; parallel electrode; piezoelectric nanofibrous membrane fabrication; piezoelectric vibration sensor; polymeric sensor; single-step fabrication; voltage 100 mV to 300 mV; Actuators; Coatings; Copper; Electrodes; Polymers; Temperature measurement; Vibrations; Electrospinning; Piezoelectric Nanofiber; Single-Step Fabrication; Vibration Sensor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
ISSN :
Pending
Print_ISBN :
978-1-4577-0157-3
Type :
conf
DOI :
10.1109/TRANSDUCERS.2011.5969163
Filename :
5969163
Link To Document :
بازگشت