Title :
A differential difference amplifier with automatic gain selection as readout interface for CMOS stress sensors in orthodontic brackets
Author :
Kuhl, M. ; Gieschke, P. ; Paul, O. ; Manoli, Y.
Author_Institution :
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
Abstract :
This paper presents two types of CMOS stress sensors and the associated readout interface. Utilizing a differential difference amplifier (DDA) in combination with a digitally assisted gain selection, the gain is maximized during each readout while the amplified sensor signal is kept within the linear output range of the DDA. The readout consumes 290 μA with a measured resolution of 22 μV at maximum gain. For the presented sensors an in-plane shear stress or differences of normal stresses as low as 24 kPa can be resolved at a full scale signal of 100 MPa, while non-mechanical contributions are suppressed. Sensors and readout are fabricated in a 0.35 μm CMOS process operating at 3.3 V.
Keywords :
CMOS integrated circuits; differential amplifiers; microfabrication; readout electronics; sensors; stress measurement; CMOS stress sensors; DDA; automatic gain selection; current 290 muA; differential difference amplifier; in-plane shear stress; nonmechanical contribution; orthodontic brackets; pressure 100 MPa; readout interface; size 0.35 mum; voltage 22 muV; voltage 3.3 V; Intelligent sensors; MOS devices; Magnetic sensors; Mechanical sensors; Semiconductor device measurement; Stress; CMOS MEMS; DDA; sensor readout; smart bracket; stress sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969177