Title :
POSFET touch sensor with on-chip electronic module for signal conditioning
Author :
Adami, A. ; Dahiya, R.S. ; Collini, C. ; Cattin, D. ; Lorenzelli, L.
Author_Institution :
Bio-MEMS, Fondazione Bruno Kessler, Trento, Italy
Abstract :
This paper presents the design, fabrication and evaluation of the new version of POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) touch sensing device based tactile sensing chip. Implemented using CMOS (Complementary Metal Oxide Semiconductor) technology, the chip consists of POSFET device and the integrated bias (a high compliance current sink) circuitry. The high compliance current sink provides the current IDS for the POSFET devices. The performance of tactile sensing chip has been evaluated in the dynamic contact forces range of 0.01-3 N and the sensitivity of POSFET devices (without amplification) is 102.4 mV/N.
Keywords :
CMOS integrated circuits; field effect transistors; signal conditioning circuits; tactile sensors; CMOS; POSFET; complementary metal oxide semiconductor; onchip electronic module; piezoelectric oxide semiconductor field effect transistor; signal conditioning; tactile sensing chip; Fabrication; Force; Logic gates; Polymers; Robot sensing systems; Silicon; CMOS; On-Chip Electronics; POSFET; Signal Conditioning; Tactile Sensing;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969194
