DocumentCode :
2529828
Title :
A novel MEMS tunable ionization sensor based on patterned freestanding Nickel nanowires and moving electrode
Author :
Walewyns, T. ; Francis, L.A.
Author_Institution :
Electr. Eng. Dept. (ELEN), Univ. catholique de Louvain (UCL), Louvain-la-Neuve, Belgium
fYear :
2011
fDate :
5-9 June 2011
Firstpage :
1986
Lastpage :
1989
Abstract :
The ionization of gases results in a unique fingerprint depending on their nature and concentration. Moreover, according to Paschen´s law, the measurement of distinct species is possible by modifying the distance between the electrodes. In order to analyze gaseous compounds within a mixture, a novel MEMS tunable sensor incorporating freestanding nanowires is proposed. This device allows controlling the ionization gap by capacitive actuation. Mechanical and electrical characterizations, together with finite elements simulations have been conducted in order to evaluate electric field interactions and minimize interferences. Such system should allow the development of a universal gas sensor with pattern recognition.
Keywords :
finite element analysis; gas sensors; ionisation; micromechanical devices; nanowires; MEMS tunable ionization sensor; MEMS tunable sensor; Paschen law; capacitive actuation; electric field interaction; finite element simulation; gas sensor; ionization gap; moving electrode; patterned freestanding nickel nanowire; unique fingerprint; Electric breakdown; Electric fields; Electrodes; Ionization; Nanowires; Polyimides; Voltage measurement; MEMS; NEMS; Paschen´s law; e-nose; field ionization; gas sensor; ion-track etched polyimide; micro-electro-mechanical system; microbridge; nanowires;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
ISSN :
Pending
Print_ISBN :
978-1-4577-0157-3
Type :
conf
DOI :
10.1109/TRANSDUCERS.2011.5969195
Filename :
5969195
Link To Document :
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