Carbon nanotubes-integrated inertial switch for reliable detection of threshold acceleration

The vertically aligned carbon nanotube (CNT)-bundle is utilized as a mechanical buffer for inertial micro-switch to extend the contact time and therefore to obtain reliable and stable output signals. The CNT bundles are directly synthesized on two facing surfaces of both movable- and stationary electrodes by patterning the catalyst on released microstructures and the following thermal chemical vapor deposition process. When the movable electrode collides with the stationary electrode, CNT bundles are elastically deformed, significantly prolonging the contact time. The measured contact time of CNT integrated inertial micro-switch was 108 μs, while the inertial micro-switch without CNT was 4.5 μs.