Title :
Analysis of acceleration sensitivity in MEMS tuning fork gyroscope
Author :
Singh, Tanu Preet ; Sugano, Koji ; Tsuchiya, Toshiyuki ; Tabata, Osamu
Author_Institution :
Dept. of Micro Eng., Kyoto Univ., Kyoto, Japan
Abstract :
This paper presents an analysis of acceleration output (sensitivity) in MEMS tuning fork gyroscopes (TFG) using simplified coupled resonators. We found that in TFG, applied acceleration in in-phase is transduced into excitation of anti-phase mode by unbalanced phase responses of the resonators. We proposed two mechanism and reduction methods; (1) coupling of the in- and anti-phase modes (frequency decoupling) and (2) energy dissipation from the anchors with different vibration systems and supporting structures. They were analyzed using FEM simulations and verified by experiments. Results showed that acceleration output decreased by one-tenth for decoupling ratio from 0.09 to 0.29.
Keywords :
acceleration measurement; finite element analysis; gyroscopes; micromechanical devices; resonators; vibrations; FEM simulation; MEMS TFG; MEMS tuning fork gyroscope; acceleration sensitivity analysis; antiphase mode excitation; coupled resonator; decoupling ratio; energy dissipation; frequency decoupling; unbalanced phase response; vibration system; Acceleration; Frequency measurement; Gyroscopes; Resonant frequency; Sensors; Springs; Vibrations; Acceleration sensitivity; Frequency decoupling; Tuning fork gyroscope;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969202
