Analysis of acceleration sensitivity in MEMS tuning fork gyroscope

Author

Singh, Tanu Preet ; Sugano, Koji ; Tsuchiya, Toshiyuki ; Tabata, Osamu

Author_Institution

Dept. of Micro Eng., Kyoto Univ., Kyoto, Japan

fYear

2011

fDate

5-9 June 2011

Firstpage

2006

Lastpage

2009

Abstract

This paper presents an analysis of acceleration output (sensitivity) in MEMS tuning fork gyroscopes (TFG) using simplified coupled resonators. We found that in TFG, applied acceleration in in-phase is transduced into excitation of anti-phase mode by unbalanced phase responses of the resonators. We proposed two mechanism and reduction methods; (1) coupling of the in- and anti-phase modes (frequency decoupling) and (2) energy dissipation from the anchors with different vibration systems and supporting structures. They were analyzed using FEM simulations and verified by experiments. Results showed that acceleration output decreased by one-tenth for decoupling ratio from 0.09 to 0.29.

Keywords

acceleration measurement; finite element analysis; gyroscopes; micromechanical devices; resonators; vibrations; FEM simulation; MEMS TFG; MEMS tuning fork gyroscope; acceleration sensitivity analysis; antiphase mode excitation; coupled resonator; decoupling ratio; energy dissipation; frequency decoupling; unbalanced phase response; vibration system; Acceleration; Frequency measurement; Gyroscopes; Resonant frequency; Sensors; Springs; Vibrations; Acceleration sensitivity; Frequency decoupling; Tuning fork gyroscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969202

Filename

5969202