Title :
Ultra-high precision MEMS accelerometer
Author :
Dong, Y. ; Zwahlen, P. ; Nguyen, A.M. ; Frosio, R. ; Rudolf, F.
Author_Institution :
Colibrys (Switzerland) Ltd., Neuchâtel, Switzerland
Abstract :
So far MEMS inertial accelerometers has struggled to reach tactical grade quality only and their bias stability and thermal drift are still obstacles to be overcome for inertial navigation systems. This paper reports on an ultrahigh precision MEMS closed-loop accelerometer recently developed by Colibrys, and the focus is on long term bias stability and thermal drift. The improvement in bias stability comes from MEMS process flow and closed-loop electronics.
Keywords :
accelerometers; inertial navigation; microsensors; Colibrys; MEMS process flow; closed-loop electronic; inertial navigation system; long term bias stability; tactical grade quality; thermal drift; ultra-high precision MEMS close-loop inertial accelerometer; Accelerometers; Micromechanical devices; Noise; Silicon; Temperature measurement; Temperature sensors; Thermal stability; Accelerometer; MEMS; inertial navigation system; long term bias stability;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969218
