Title :
Artificial hair cell with embedded piezoresistive force sensors
Author :
Han, Ji-Eun ; Kim, Dongil ; Yun, Kwang-Seok
Author_Institution :
Samsung Electron., Giheung, South Korea
Abstract :
In this paper, we present the preparation, characterization and fabrication of flexible force sensors implemented with an electrically conducting nanocomposite polymer. The conductive polymer was composed of multi-walled carbon nanotubes (MWCNT) and polydimethylsiloxane (PDMS) which was processed into sensor configuration by using polymer MEMS technologies. We characterize and compare the conductivity and gauge factor of fabricated sensor as a function of different weight percentages of MWCNT (ranging from 6 to 16 %).
Keywords :
carbon nanotubes; conducting polymers; force sensors; intelligent robots; intelligent sensors; nanocomposites; nanofabrication; piezoresistive devices; C; MWCNT; PDMS; artificial hair cell; conductive polymer; electrically conducting nanocomposite polymer; embedded piezoresistive flexible force sensor; gauge factor; intelligent robot industry; multiwalled carbon nanotube; polydimethylsiloxane; polymer MEMS technology; sensor configuration; Electrical resistance measurement; Force; Hair; Piezoresistance; Polymers; Robot sensing systems; CNT-PDMS composite; force sensor; hair cell;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969220
