Title :
Single-crystal-silicon vibratory cylinderical rate integrating gyroscope (CING)
Author :
Cho, J. ; Gregory, J.A. ; Najafi, K.
Author_Institution :
Center for Wireless Integrated Microsyst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
This paper reports the architecture and operation of a single-crystal cylindrical rate-integrating gyroscope (CING). The attractive features of the CING include mode stability due to the separation of the wineglass modes from the in-phase-parasitic modes, self-alignment of sensor components, and fabrication. The CING is built using a silicon-on-glass (SOG) process using a (111) Si wafer. It operates at 17.9kHz, has an average Q of 21,800 and a damping-time mismatch of Δτ of 0.7ms along the measured axes, corresponding to a damping-constant mismatch of (Δ1/τ) of 0.0047Hz at a pressure of <;5mTorr. The CING is operated in the whole angle mode with first-generation interface circuitry consisting of software-defined radio.
Keywords :
elemental semiconductors; glass; gyroscopes; microfabrication; microsensors; silicon; SOG process; Si; axe measurement; damping-constant mismatch; damping-time mismatch; first-generation interface circuitry; frequency 17.9 kHz; in-phase-parasitic mode; sensor self-alignment; silicon-on-glass process; single-crystal vibratory CING; single-crystal vibratory cylindrical rate-integrating gyroscope; software-defined radio; wineglass modes stability; Damping; Electrodes; Frequency measurement; Gyroscopes; Resonant frequency; Silicon; Temperature measurement; Rate-integrating gyroscope; whole angle gyroscope;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969224
