Title :
A micromechanical ultrasonic distance sensor with >1 meter range
Author :
Przybyla, Richard ; Flynn, Anita ; Jain, Vipul ; Shelton, Stefon ; Guedes, André ; Izyumin, Igor ; Horsley, David ; Boser, Bernhard
Author_Institution :
Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, CA, USA
Abstract :
Ultrasonic distance sensors based on piezoceramic transducers have >;1m range and millimeter accuracy but require the use of bulky transducers. Existing micromachined sensors deliver inferior performance, with maximum range in the tens of centimeters. We present theory, design equations, and measured results for a micromechanical ultrasonic distance sensor which approaches the performance of piezoceramic-based solutions. The sensor has a maximum range >;1300mm and random errors (3σ) of <;1.7mm at 1.3m.
Keywords :
III-V semiconductors; aluminium compounds; micromachining; microsensors; piezoceramics; ultrasonic transducers; wide band gap semiconductors; AlN; bulky transducers; micromachined sensor; micromechanical ultrasonic distance sensor; millimeter accuracy; piezoceramic transducer; Acoustics; Band pass filters; Bandwidth; Signal to noise ratio; Transducers; Ultrasonic imaging; Ultrasound transducer; aluminum nitride; distance sensor; micromachined; piezoelectric; time-of-flight;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969226
