ZnO thin film resonator lattice filters

ZnO thin film resonator lattice filter results at GHz frequencies are reported. These filters are very compact, measuring 1 mm by 1 mm, have balanced input and output, and have insertion loss of approximately 1.5 dB at 1.5 GHz, while selectivity is over 30 dB. The performance of these lattice filters compares very favorably with ladder filters processed on the same silicon wafer with identical figure of merit, Q/r, having approximately double the bandwidth of the ladder filters. These filters are best used with ICs with differential I/O which are becoming commercially available from semiconductor companies