Improvement in selectivity of NO2 sensors based on WO3 thin films with MnO2 filters deposited by radio frequency sputtering

Author

Zhang, C. ; Boudiba, A. ; Navio, C. ; Olivier, M. -G ; Snyders, R. ; Debliquy, M.

Author_Institution

Service de Sci. des Mater., Univ. de Mons, Mons, Belgium

fYear

2011

fDate

5-9 June 2011

Firstpage

154

Lastpage

157

Abstract

Thin-film WO₃ sensor with a MnO₂ filter was prepared to reduce interference of O₃ for NO₂ detection. The multi-films (WO₃ film, MnO₂ filter and WO₃+MnO₂ insulting layer) were deposited by radio frequency sputtering. The microstructure and crystalline phase of the films were characterized with SEM and XRD. The sensors were tested for 25-200 ppb O₃ and 50-400 ppb NO₂ in moist air at temperatures ranging from 150°C to 250°C. The results show that the sensors with thin filters are capable to reduce the interference from O₃.

Keywords

X-ray diffraction; filters; manganese compounds; scanning electron microscopy; sputtering; thin film sensors; MnO₂; SEM; XRD; interference reduction; microstructure-crystalline phase; radio frequency sputtering; temperature 150 degC to 250 degC; thin film sensor; thin filters; Films; Gas detectors; Resistance; Sensor phenomena and characterization; Temperature measurement; Temperature sensors; NO2 sensor; O3 filter; manganese oxide; radio frequency sputtering; tungsten oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969247

Filename

5969247