Title :
Thin film gas sensor for detection of toxic gases from microbial
Author :
Han, Sang-Do ; Sohn, Y. -S
Author_Institution :
Energy Conversion & Storage Res. Center, Korea Inst. of Energy Res., Daejeon, South Korea
Abstract :
The metal-oxide semiconductor thin film gas sensor with high resistivity based on In2O3 has been characterized to detect toxic gases including acetaldehyde which stems from the mold. The sensor device was fabricated by coating of gold (Au) electrode and platinum (Pt) heater on the alumina substrate. In order to enhance the sensitivity the catalyst such as Au and palladium (Pd) was deposited using the thermal evaporator. The responses of the In2O3 metal-oxide semiconductor thin films with the Au catalyst show outstanding sensitivity, selectivity, absorption/desorption and linearity to acetaldehyde.
Keywords :
MIS devices; catalysts; electrochemical electrodes; gas sensors; gold; indium compounds; palladium; thin film sensors; In2O3; absorption-desorption; acetaldehyde; catalyst sensitivity enhancement; metal-oxide semiconductor thin film gas sensor; palladium; thermal evaporator; toxic gas detection; Gas detectors; Gases; Gold; Sensitivity; Temperature sensors; Au catalyst; Sensor; thin film; toxic gas;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969248
