Title :
CO2 measurement using an AlN/SI SAW sensor
Author :
Fanget, S. ; Grange, H. ; Palancade, F. ; Ganuchaud, G. ; Matheron, M. ; Charlot, S. ; Bordy, T. ; Hoang, T. ; Rey, P. ; Mercier, D. ; Brunet-Manquat, P. ; Robert, P.
Author_Institution :
CEA-Leti, Grenoble, France
Abstract :
Carbon dioxide at concentrations close to 390ppm in atmosphere has to be measured for greenhouse effect and the indoor air quality monitoring. This paper reports for the first time CO2 measurement ranging from 0 to 3000ppm using a Surface Acoustic Wave sensor (SAW) based on Aluminum Nitride (AlN) technology. The detection is based on gravimetric approach using a 100 nm thick sensitive polymer bearing amino groups: poly(Allylamine) deposited over the SAW. A calculated CO2 sensitivity of about 15.3 Hz/ppm performed using Finite Element Method is in good agreement with experiment.
Keywords :
air pollution; aluminium compounds; carbon compounds; finite element analysis; gas sensors; gravimeters; silicon; surface acoustic wave sensors; AlN-SI; CO2; SAW sensor; finite element method; gravimetric approach; greenhouse effect; indoor air quality monitoring; poly(Allylamine); polymer bearing amino group; size 100 nm; surface acoustic wave sensor; Analytical models; Atmospheric measurements; Frequency modulation; Particle measurements; Radio frequency; Silicon; Surface acoustic waves; Aluminum Nitride; Carbon dioxide detection; Surface Acoustic Wave sensor; gas sensor; sensitive polymers;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969259
