Title :
Locally synthesized metal oxide nanowire-devices and their gas sensing applications
Author :
Kim, D. ; Lim, M.A. ; Yang, D. ; Li, Z. ; Park, C.O. ; Park, I.
Author_Institution :
Dept. of Mech. Eng., KAIST, Daejeon, South Korea
Abstract :
Highly efficient and simple process to fabricate ZnO nanowire-based gas sensing devices was developed. ZnO nanowires (NWs) were locally synthesized by hydrothermal method using localized thermal energy, which is generated by microheater arrays integrated in the device. To enhance the sensitivity to hydrogen (H2) gas of ZnO NW-based sensor, the surface of ZnO NWs was modified with Platinum (Pt) nanoparticles via local wet chemical reaction. H2 sensing performances of the intrinsic and Pt-coated ZnO NWs were compared at two operating temperatures (250°C and 350°C). We found that the sensing device based on ZnO NWs decorated with Pt nanoparticles has higher sensitivity compared with intrinsic ZnO NW sensor.
Keywords :
II-VI semiconductors; crystal growth from solution; gas sensors; heating elements; hydrogen; microsensors; nanoelectromechanical devices; nanowires; platinum; zinc compounds; H2; Pt; ZnO; gas sensing application; hydrogen gas; hydrothermal method; local wet chemical reaction; localized thermal energy; metal oxide nanowire device; microheater array; Electrodes; Heating; Nanowires; Sensitivity; Sensors; Surface treatment; Zinc oxide; Hydrogen gas sensor; Localized hydrothermal synthesis; ZnO Nanowire;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969268
