Advances in polymer-coated surface acoustic wave gas sensor

Author

He, Shitang ; Wang, Wen ; Li, Shunzhou ; Liu, Minghua

Author_Institution

Inst. of Acoust., Chinese Acad. of Sci., Beijing, China

fYear

2011

fDate

5-9 June 2011

Firstpage

1144

Lastpage

1147

Abstract

This paper presents some advances in polymer-coated surface acoustic wave (SAW) gas sensor research towards to organophosphorous compounds detection relating to the response mechanism analysis by using some new chemically interactive materials and deposition techniques, and SAW oscillator with superior frequency stability, which are illustrated and discussed in some detail. A 300MHz SAW based delay-line-oscillator coated with PECH(Poly(epichloro-hydrin)) for HD (mustard) detection was performed, in which, a single phase unidirectional transducers (SPUDT) and combed transducer were used to structure the SAW device. The sensor experimental results confirmed the theoretical analysis, high sensitivity and good stability were observed experimentally.

Keywords

chemical hazards; gas sensors; polymers; surface acoustic wave oscillators; surface acoustic wave sensors; PECH; Poly(epichloro-hydrin); SAW gas sensor; SAW oscillator; chemically interactive material; delay line oscillator; deposition technique; frequency stability; mustard detection; organophosphorous compounds detection; polymer coated surface acoustic wave gas sensor; Attenuation; Chemicals; Coatings; High definition video; Monitoring; Polymers; Surface acoustic waves; PECH; SAW chemical sensor; oscillator; response mechanism; sensitivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969271

Filename

5969271