Title :
Hydrogen sensor based on palladium nanotube arrays fabricated by novel low-temperature hydrothermal synthesis
Author :
Lim, M.A. ; Kim, D. ; Park, C.-O. ; Li, Z. ; Park, I.
Author_Institution :
Dept. of Mech. Eng., KAIST, Daejeon, South Korea
Abstract :
Palladium (Pd) nanotube array was fabricated by a facile solution process using hydrothermally synthesized ZnO nanowires as sacrificial templates and Pd precursor solution. The morphology, structure, and composition of the nanotubes were characterized by SEM, TEM, HAADF-STEM, and ICP-ACS, respectively. To investigate hydrogen sensing performance, Pd nanotube arrays were fabricated on interdigitated electrodes of a silicon chip and the electrical resistance change of Pd nanotube array sensor was measured depending on the concentration of hydrogen gas and operating temperature. Pd nanotube arrays sensor was also fabricated on polymer substrate by the same method and exhibited a good hydrogen detection performance.
Keywords :
crystal growth from solution; gas sensors; nanosensors; nanotube devices; palladium; polymers; scanning electron microscopy; silicon; transmission electron microscopy; HAADF-STEM; ICP-ACS; Pd; SEM; Si; ZnO; electrical resistance; facile solution process; hydrogen sensor; hydrothermally synthesized nanowire; interdigitated electrode; lowtemperature hydrothermal synthesis; nanotube array; polymer substrate; precursor solution; sacrificial template; silicon chip; Nanowires; Sensitivity; Sensor arrays; Silicon; Substrates; Zinc oxide; Flexible Sensor; Hydrogen Sensor; Nanotube; Palladium;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969278
