Title :
Table of contents
Abstract :
The following topics are dealt with: inertial sensors; power MEMS; cell handling; cell analysis; chemical sensors; CMOS-MEMS; RF-MEMS; wet assembly; biomolecular sensing; physical sensors; resonators; oscillators; bioprobes; biodevices; wafer level process; acoustics; damping; vibration; actuators; nanofabrication; microfluidics; 3D integration; optofluidics; bioanalysis tools; energy harvesting; nanodevice materials; optics; biomedical microdevices; photonic crystals materials; nanotubes; nanowires; microorganisms; polymers; wireless system; gyroscopes; medical devices; harsh environmental reliability; displays; scanners and modulators.
Keywords :
CMOS integrated circuits; actuators; biomolecular electronics; biosensors; chemical sensors; display instrumentation; energy harvesting; gyroscopes; micro-optics; microfabrication; microfluidics; microorganisms; microsensors; modulators; nanofabrication; nanophotonics; nanotubes; nanowires; oscillators; photonic crystals; polymers; reliability; resonators; three-dimensional integrated circuits; vibrations; wafer level packaging; 3D integration; CMOS-MEMS; RF-MEMS; acoustic; actuator; bioanalysis tool; biodevice; biomedical microdevice; biomolecular sensing; bioprobe; cell analysis; cell handling; chemical sensor; damping; display; energy harvesting; gyroscope; harsh environmental reliability; inertial sensor; microfluidic; microorganism; modulator; nanodevice material; nanofabrication; nanotube; nanowire; optic; optofluidic; oscillator; photonic crystals material; physical sensor; polymer; power MEMS; resonator; scanner; vibration; wafer level process; wet assembly; wireless system;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969279
