Title :
Measuring the frequnecy resolution of a multi degree of freedom resonator for mass detection
Author :
Moran, K.M. ; Turner, K.L.
Author_Institution :
Dept. of Mech. Eng., UCSB, Santa Barbara, CA, USA
Abstract :
This work focuses on measuring resolution of a coupled, single input single output, multi degree of freedom (MDOF) resonator. This type of device can be operated as a chemical nose. Specifically, we show that the loss in resolution due to coupling does not degrade the signal beyond the usable spectrum. In fact, the sensing cantilevers in this prototype are able to detect as low as 1.47 fg mass sensitivity for a near ambient, table top experiment.
Keywords :
cantilevers; chemical sensors; frequency measurement; mass measurement; micromechanical resonators; microsensors; MDOF resonator; MEMS size scale devices; SISO transducer; frequency resolution measurement; mass detection; mass sensor; multidegree of freedom resonator; sensing cantilevers; Couplings; Frequency measurement; Laser beams; Measurement by laser beam; Resonant frequency; Sensitivity; Sensors; Frequency Resolution; MEMS; Mass sensor; Resonator; Single Input Single Output (SISO); chemical nose;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969281
