DocumentCode
2531539
Title
Non-invasive mapping of fluid temperature and flow in microsystems
Author
Cyca, Michael J. ; Spiewak, Swavik A. ; Hugo, Ronald J.
Author_Institution
Calgary Univ., Alta., Canada
fYear
2005
fDate
24-27 July 2005
Firstpage
21
Lastpage
26
Abstract
Currently available temperature and fluid flow measurement methods have shown limitations in microscale systems. This research concerns the development of a non-invasive optical measurement technique and sensor for mapping two-dimensional temperature fields and, ultimately fluid flows. The system is based on the Shack-Hartmann wave-front sensor. Analytical considerations underlying the mapping technique and preliminary experimental results are presented. Two experimental rigs involved in this study are also discussed.
Keywords
flow measurement; microfluidics; microsensors; Shack-Hartmann wave-front sensor; fluid flow measurement; fluid temperature; microsystems; noninvasive mapping; optical measurement technique; Adaptive optics; Extraterrestrial measurements; Fluid flow; Fluid flow measurement; Measurement techniques; Optical arrays; Optical distortion; Optical sensors; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.85
Filename
1540764
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