Title :
Avery Dennison micro-nano replication capabilities for MEMS and microfluidics
Author_Institution :
Avery Res. Center, Pasadena, CA, USA
Abstract :
Polymers can be used as one of most promising materials for MEMS applications. In this paper, we successfully demonstrated embossing micro-nano structures on polymers, especially high temperature polymers (>300°C) by using Avery´s unique proprietary embossing technology. Also in this paper, we demonstrated a roll-to-roll embossing/lamination method for manufacturing low cost plastic microfluidics devices.
Keywords :
embossing; microfluidics; nanostructured materials; nanotechnology; polymers; replica techniques; Avery Dennison micronano replication capabilities; Avery´s unique proprietary embossing technology; MEMS applications; embossing micronanostructures; high temperature polymers; plastic microfluidics devices; roll-roll embossing/lamination method; Biological materials; Costs; Embossing; Heating; Microfluidics; Micromechanical devices; Optical materials; Plastics; Polymers; Temperature; Embossing; MEMS; Microfluidics; Polymer;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.29
