DocumentCode
2531551
Title
Avery Dennison micro-nano replication capabilities for MEMS and microfluidics
Author
Chu, Philip
Author_Institution
Avery Res. Center, Pasadena, CA, USA
fYear
2005
fDate
24-27 July 2005
Firstpage
27
Lastpage
29
Abstract
Polymers can be used as one of most promising materials for MEMS applications. In this paper, we successfully demonstrated embossing micro-nano structures on polymers, especially high temperature polymers (>300°C) by using Avery´s unique proprietary embossing technology. Also in this paper, we demonstrated a roll-to-roll embossing/lamination method for manufacturing low cost plastic microfluidics devices.
Keywords
embossing; microfluidics; nanostructured materials; nanotechnology; polymers; replica techniques; Avery Dennison micronano replication capabilities; Avery´s unique proprietary embossing technology; MEMS applications; embossing micronanostructures; high temperature polymers; plastic microfluidics devices; roll-roll embossing/lamination method; Biological materials; Costs; Embossing; Heating; Microfluidics; Micromechanical devices; Optical materials; Plastics; Polymers; Temperature; Embossing; MEMS; Microfluidics; Polymer;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.29
Filename
1540765
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