• DocumentCode
    2531628
  • Title

    Carbon nanotube based high current transistors

  • Author

    Seidel, R. ; Graham, A.P. ; Unger, E. ; Duesberg, G.S. ; Liebau, M. ; Steinhoegl, W. ; Pamler, W. ; Kreupl, F.

  • Author_Institution
    Corp. Res., Infineon Technol. AG, Munich, Germany
  • fYear
    2004
  • fDate
    16-19 Aug. 2004
  • Firstpage
    7
  • Lastpage
    9
  • Abstract
    We have constructed planar field-effect-transistors capable of switching currents of up to several milliamperes based on randomly placed single-walled carbon nanotubes (SWCNTs). The SWCNTs were grown using a chemical vapor deposition (CVD) process from a nickel based catalyst at a temperature of 650°C. Transistor source and drain contacts were defined using electron-beam lithography. The use of several hundreds of SWCNTs in parallel facilitates the incorporation of randomly deposited tubes into practical transistors that can be used as normal switches or, when appropriately chemically functionalized, as gas or biomolecule detectors.
  • Keywords
    carbon nanotubes; chemical vapour deposition; electron beam lithography; field effect transistors; nanotube devices; 650 degC; CVD; biomolecule detector; carbon nanotube based high current transistors; chemical vapor deposition process; drain contact; electron-beam lithography; gas detector; nickel based catalyst; planar field-effect-transistors; single-walled carbon nanotubes; source contact; switching current; Carbon nanotubes; Chemical technology; Chemical vapor deposition; Lithography; Nickel; Semiconductivity; Silicon; Substrates; Temperature; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2004. 4th IEEE Conference on
  • Print_ISBN
    0-7803-8536-5
  • Type

    conf

  • DOI
    10.1109/NANO.2004.1392231
  • Filename
    1392231