Title :
Deformation analysis of tunable Fabry-Perot structure caused by thermal residual gradient stresses
Author :
Chang, Pen-Lun ; Wang, Shun-Wu ; Lin, Meng-Ju
Author_Institution :
Dept. of Mech. & Comput.-Aided Eng., Feng Chia Univ., Taichung, Taiwan
Abstract :
The deformation of Fabry-Perot caused by thermal residual stresses is investigated. The sizes of structure have effect on deformation, especially the ratio of width to length, W/L. If the W/L ratio is smaller, the deformation is larger. But, the structure could be still considered as flat surface. It only tilts an angle. However, when depositing a material on the structure layer, the structure would no more flat for the mismatch of thermal expansion coefficients inducing larger thermal residual gradient. The results show the structure with larger W/L ratio will be more flat. If the W/L ratio is less than one, the structure is deformed and has less flat part. Even the warpage could happen.
Keywords :
deformation; internal stresses; optical filters; thermal expansion; thermal stresses; deformation analysis; thermal expansion coefficient; thermal residual gradient stress; tunable Fabry-Perot filter; Biomembranes; Fabry-Perot; Finite element methods; Mirrors; Optical fiber filters; Optical filters; Residual stresses; Suspensions; Temperature; Thermal stresses;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.38
