Title :
Carbon nanotube-tipped microcantilever arrays for imaging, testing, and 3D nanomanipulation: design and control
Author :
Lee, Eunjeong ; Chung, Myung Jin
Author_Institution :
Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
This paper discusses design and control of massively parallel microcantilever arrays with multiwalled carbon nanotube tips. It can be used for imaging, testing and 3D nanomanipulation of nanoparticles and biological samples. The microcantilever has a multiwalled carbon nanotube tip and four additional carbon nanotubes for 3D fine manipulation by electrostatic forces. The microcantilever is attached to a piezoelectric actuator that can be individually actuated. The reflected light from the deflected microcantilever is collected by a position sensitive photodetector and fast readout is achieved by a time-multiplexing scheme. A controller is proposed for nanomanipulation of samples and tapping mode operation based on a distributed parameter system model. The controller performance is shown via simulation.
Keywords :
biomedical imaging; carbon nanotubes; control system synthesis; distributed parameter systems; electrostatics; elemental semiconductors; micromechanical devices; nanoparticles; nanotube devices; photodetectors; piezoelectric actuators; position measurement; silicon; 3D nanomanipulation; C-Si; biological samples; carbon nanotube-tipped microcantilever arrays; distributed parameter system model; electrostatic forces; multiwalled carbon nanotube tips; nanoparticles; piezoelectric actuator; position sensitive photodetector; tapping mode operation; time-multiplexing scheme; Atomic force microscopy; Biological system modeling; Biological systems; Carbon nanotubes; Chemicals; Electrostatics; Nanobioscience; Optical imaging; Photodetectors; Testing;
Conference_Titel :
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN :
0-7803-8536-5
DOI :
10.1109/NANO.2004.1392240
