Title :
Inductively coupled wirebonded microcoils for wireless on-chip NMR
Author :
Badilita, V. ; Fassbender, B. ; Gruschke, O. ; Kratt, K. ; Meier, R. ; Sakellariou, D. ; Korvink, J.G. ; Wallrabe, U.
Author_Institution :
Dept. of Microsyst. Eng. - IMTEK, Univ. of Freiburg, Freiburg, Germany
Abstract :
We report for the first time single-chip MEMS-integration of a resonant LC-circuit for wireless magic angle coil spinning (MACS) NMR. The chip consists of a wirebonded 3D microcoil, an interdigitated capacitor and a sample container. The LC-circuit resonates at 700MHz for 1H spectroscopy in 16.4T magnetic field. The microcoil is inductively coupled with the probe-coil of the spectrometer. We prove the high sensitivity of the setup by detecting the NMR signal from 0.3nl H2O in a mixture with deuterium oxide (0.1% H2O: 99.9% D2O) with an SNR=8.5 in one scan.
Keywords :
NMR spectroscopy; bioMEMS; capacitors; deuterium compounds; magic angle spinning; deuterium oxide; frequency 700 MHz; inductively coupled wirebonded 3D microcoils; interdigitated capacitor; magnetic flux density 16.4 T; resonant LC-circuit; single-chip MEMS-integration; wireless magic angle coil spinning; wireless on-chip NMR; Capacitors; Electrodes; Nuclear magnetic resonance; System-on-a-chip; Water; Wireless communication; Wireless sensor networks; inductive coupling; microcoils; on-chip NMR;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969321
