Analysis of tip effects on the dynamic characteristics of V-shaped atomic force microscope probes

Author

Chen, Kun-Nan ; Huang, Jen-Ching

Author_Institution

Dept. of Mech. Eng., Tung Nan Inst. of Technol., Taipei, Taiwan

fYear

2005

fDate

24-27 July 2005

Firstpage

65

Lastpage

68

Abstract

When an atomic force microscope (AFM) operates in a dynamic mode, the AFM probe is vibrated in a high frequency. Each vibration mode of the cantilevered probe has a different modal sensitivity that is defined as the change in frequency due to a change in the contact stiffness, and the scanned image contrast is significantly dictated by this sensitivity. This paper shows, by the finite element method, the significant effects of various tip lengths on the resonant frequencies and modal sensitivities for a commercial AFM V-shaped probe.

Keywords

atomic force microscopy; finite element analysis; mechanical contact; micromechanical devices; vibrational modes; V-shaped atomic force microscope probe; cantilevered probe; contact stiffness; dynamic characteristic; finite element method; modal sensitivity; scanned image contrast; tip effect; vibration mode; Atomic force microscopy; Chromium; Finite element methods; Gold; Mechanical engineering; Probes; Resonant frequency; Shape; Silicon; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on

Print_ISBN

0-7695-2398-6

Type

conf

DOI

10.1109/ICMENS.2005.26

Filename

1540778