Dip pen nanolithography™ and its potential for nanoelectronics

Author

Rosner, Bjoem ; Amro, Nabil ; Disawal, Sandeep ; Demers, Linette ; Zhang, Hua ; Rendlen, Jeff ; Duenas, Tenisa ; Shile, Roger ; Fragala, Joe ; Elghanian, Robert

Author_Institution

NanoInk Inc., Chicago, IL, USA

fYear

2004

fDate

16-19 Aug. 2004

Firstpage

59

Lastpage

61

Abstract

Dip pen nanolithography (DPN™) is a patterning technique for nanoscale science and engineering based on scanning probe microscopy. Its main advantages are very high resolution, the unique capability to deposit many different materials directly onto a substrate and low cost of ownership. We present here new research and development efforts that demonstrate the potential of DPN as a tool to produce nanoelectronic devices and circuits. We show the direct deposition of electronic materials as well as the use of external accessories to accelerate the development phase of nanoelectronic components.

Keywords

nanoelectronics; nanolithography; nanopatterning; scanning probe microscopy; dip pen nanolithography; direct deposition; electronic materials; nanoelectronic components; nanoelectronic devices; nanoelectronics circuits; patterning technique; scanning probe microscopy; Biological materials; Electronics packaging; Nanobioscience; Nanoelectronics; Nanolithography; Nanoscale devices; Nanostructures; Research and development; Scanning probe microscopy; Semiconductor materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2004. 4th IEEE Conference on

Print_ISBN

0-7803-8536-5

Type

conf

DOI

10.1109/NANO.2004.1392249

Filename

1392249