• DocumentCode
    2532037
  • Title

    LIGA cavity resonator for K-band applications

  • Author

    Ma, Z. ; Klymyshyn, D.M. ; Achenbach, S. ; Mohr, J.

  • Author_Institution
    TRLabs, Saskatoon, Sask., Canada
  • fYear
    2005
  • fDate
    24-27 July 2005
  • Firstpage
    106
  • Lastpage
    109
  • Abstract
    A 2-mm deep microwave cavity resonator is proposed for UGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q) factor. Simulation using 3-D finite element method (FEM) shows an unloaded Q (Qu) very close to the theoretical calculation. Feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated.
  • Keywords
    LIGA; Q-factor; cavity resonators; finite element analysis; microwave devices; 3D finite element method; K-band applications; LIGA cavity resonator; UGA microfabrication; deep microwave cavity resonator; hard X-ray lithography; quality factor; smooth sidewalls; Cavity resonators; Circuits; Etching; Frequency; K-band; Optical resonators; Q factor; Rough surfaces; Silicon; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
  • Print_ISBN
    0-7695-2398-6
  • Type

    conf

  • DOI
    10.1109/ICMENS.2005.65
  • Filename
    1540790
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2532037