Title :
Ultrasensitive dielectric filled Lamé mode biomass sensor
Author :
Heidari, Amir ; Yoon, Yong-Jin ; Park, Mi Kyoung ; Park, Woo-Tae ; Lin, Julius Tsai Ming
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000 and the mass sensitivity of -400 Hz/pg. The resonators were fabricated using the silicon-on-insulator MEMS process.
Keywords :
bioMEMS; biosensors; bulk acoustic wave devices; dielectric materials; elemental semiconductors; mass measurement; micromachining; microsensors; silicon-on-insulator; Lame bulk acoustic resonant mode; Lame mode biomass sensor; frequency 37.8 MHz; high performance biomass sensor; high quality output signal; micromachined silicon squared plate; silicon on insulator MEMS process; small biological agent detection; ultrasensitive dielectric; Biosensors; Electrodes; Fabrication; Optical resonators; Resonant frequency; Sensitivity; Silicon; Biosensor; capacitive filled gap transducer; mass sensitivity; motional resistance; quality factor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969338
