DocumentCode
2532265
Title
Focusing anomalies in the vicinity of dielectric interfaces
Author
Köklü, F. Hakan ; Ünlü, M. Selim
Author_Institution
Dept. of Electr. & Comput. Eng., Boston Univ., Boston, MA, USA
fYear
2009
fDate
4-8 Oct. 2009
Firstpage
359
Lastpage
360
Abstract
We investigate the interface effects on high numerical aperture focusing of linearly polarized illumination. Theoretical and experimental demonstration is conducted in subsurface backside microscopy of silicon integrated circuits.
Keywords
dielectric materials; light polarisation; monolithic integrated circuits; optical microscopy; Si; dielectric interfaces; focusing anomalies; interface effects; linearly polarized illumination; numerical aperture; silicon integrated circuits; subsurface backside microscopy; Apertures; Dielectrics; Focusing; High-resolution imaging; Lighting; Nails; Optical imaging; Optical microscopy; Polarization; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location
Belek-Antalya
ISSN
1092-8081
Print_ISBN
978-1-4244-3680-4
Electronic_ISBN
1092-8081
Type
conf
DOI
10.1109/LEOS.2009.5343091
Filename
5343091
Link To Document