Title :
Focusing anomalies in the vicinity of dielectric interfaces
Author :
Köklü, F. Hakan ; Ünlü, M. Selim
Author_Institution :
Dept. of Electr. & Comput. Eng., Boston Univ., Boston, MA, USA
Abstract :
We investigate the interface effects on high numerical aperture focusing of linearly polarized illumination. Theoretical and experimental demonstration is conducted in subsurface backside microscopy of silicon integrated circuits.
Keywords :
dielectric materials; light polarisation; monolithic integrated circuits; optical microscopy; Si; dielectric interfaces; focusing anomalies; interface effects; linearly polarized illumination; numerical aperture; silicon integrated circuits; subsurface backside microscopy; Apertures; Dielectrics; Focusing; High-resolution imaging; Lighting; Nails; Optical imaging; Optical microscopy; Polarization; Silicon;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343091
