DocumentCode :
2532476
Title :
Next generation microbolometers for high resolution remote sensing
Author :
Phong, L. Ngo ; Lee, J. ; Zheng, W. ; Pope, T.D. ; Alain, C. ; Elias, S. ; Jerominek, H.
Author_Institution :
Canadian Space Agency, Ottawa, Ont., Canada
fYear :
2005
fDate :
24-27 July 2005
Firstpage :
197
Lastpage :
198
Abstract :
We describe our recent work on improving the time constant and NETD of uncooled microbolometer detector. Such improvement would enable infrared remote sensing with a spatial resolution better than 150 m from low earth orbits. Radiometric simulation of the new microbolometer designs shows that reduction of time constant by a factor of 3 and reduction of NETD by a factor of 1.5 can be achieved. Linear arrays of 512×3 microbolometers embedding the new designs have been fabricated for experimental validation.
Keywords :
bolometers; geophysical equipment; infrared detectors; radiometry; remote sensing; NETD; earth orbits; high resolution remote sensing; infrared remote sensing; radiometric simulation; spatial resolution; time constant; uncooled microbolometer detector; Bridge circuits; Detectors; Low earth orbit satellites; Micromechanical devices; Remote monitoring; Remote sensing; Smart pixels; Space technology; Spatial resolution; Thermal conductivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
Type :
conf
DOI :
10.1109/ICMENS.2005.84
Filename :
1540815
Link To Document :
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