Title :
Ultra-small site temperature sensing by carbon nanotube thermal probes
Author :
Arai, Fumihito ; NG, Chinaik ; Liu, Pou ; Dong, Lixin ; Imaizumi, Yoshiaki ; Maeda, Kazutoshi ; Maruyama, Hisataka ; Ichikawa, Akihiko ; Fukuda, Toshio
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
We have assembled thermal probes with single carbon nanotubes (CNTs) for sensing temperature distribution in local area. The temperature coefficient of resistance of the thermal probes shows the positive characteristics. The feasibility of the CNT thermal probes for scanning local area temperature is investigated in nanometer order. We have implemented the assembled CNT thermal probes for temperature measurement and calibration of CNT nanoheater, and demonstrated them to be novel temperature sensors.
Keywords :
carbon nanotubes; electrical resistivity; nanotube devices; temperature distribution; temperature measurement; temperature sensors; C; CNT thermal probes; carbon nanotube nanoheater; carbon nanotube thermal probes; nanometer order; scanning local area temperature; temperature distribution; temperature measurement; temperature resistance coefficient; temperature sensors; ultra small site temperature sensing; Assembly systems; Atomic force microscopy; Carbon nanotubes; Electrodes; Probes; Scanning electron microscopy; Temperature measurement; Temperature sensors; Thermal engineering; Thermal resistance;
Conference_Titel :
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN :
0-7803-8536-5
DOI :
10.1109/NANO.2004.1392278
