Title :
Similarities and differences in the analytical descriptions of the acceleration sensitivities of acoustic bulk and surface wave resonators
Author_Institution :
Dept. of Mech. Eng. & Areonaut. Eng. & Mech., Rensselaer Polytech. Inst., Troy, NY, USA
Abstract :
The importance and advantages of the use of finite deformation theory in the analytical description of the influence of biasing states in general and acceleration in particular on the accurate prediction of the behavior of precision resonant devices is noted. The unknown intermediate biasing state is defined and the electroelastic equations are presented referred to the known reference coordinates. The useful equation for the perturbation in eigenfrequency was obtained from these equations. The detailed mode shapes of both surface wave and contoured resonators are presented, as are the equations of the extension and flexure of thin plates for the determination of the biasing states. Some results on acceleration sensitivity for both surface wave and contoured resonators are presented and contrasted
Keywords :
bulk acoustic wave devices; eigenvalues and eigenfunctions; surface acoustic wave resonators; acceleration sensitivities; acoustic bulk wave resonators; acoustic surface wave resonators; biasing states; contoured resonators; eigenfrequency perturbation; electroelastic equations; extension; finite deformation theory; flexure; mode shapes; precision resonant devices; thin plates; Acceleration; Aerospace engineering; Equations; Frequency; Geometry; Mechanical engineering; Resonance; Shape; Surface acoustic waves; Surface waves;
Conference_Titel :
Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-3309-8
DOI :
10.1109/FREQ.1996.559892