Title :
Hydrogel microvalve device modeling and simulation
Author :
Ibrahim, M.W.A. ; Saunders, J.R. ; Walied, A. Moussa
Author_Institution :
Multiphys. & MEMS simulation lab., Alberta Univ., Edmonton, Alta., Canada
Abstract :
The modeling and simulation of fabricated 3D hybrid hydrogel microvalve using a commercial FE package is presented in this paper. A PDMS diaphragm is deflected to 197.5 μm. A stimulated hydrogel volume swelled to 465% of its original volume. Results of the finite element analysis are reported and a comparison to the fabricated model results is made.
Keywords :
finite element analysis; microvalves; polymer gels; 3D hybrid hydrogel microvalve device modeling; finite element analysis; finite element package; polydimethylsiloxane diaphragm; Actuators; Fabrication; Finite element methods; Microchannel; Microfluidics; Micromechanical devices; Microvalves; Packaging; Sensor phenomena and characterization; Temperature sensors;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.56
