Focused ion beam milled on-chip resonator nanostructures for applications in rare-earth-ion-doped Al2O3 active waveguides

Author

Ay, F. ; Kauppinen, L.J. ; Bradley, J.D.B. ; Wörhoff, K. ; de Ridder, R.M. ; Pollnau, M.

Author_Institution

Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands

fYear

2009

fDate

4-8 Oct. 2009

Firstpage

379

Lastpage

380

Abstract

Reflection gratings on Al₂O₃ channel waveguides were defined by focused ion beam milling. Fabry-Perot microcavities were fabricated and improved performance upon annealing was demonstrated, making them viable candidates as resonators for on-chip waveguide lasers.

Keywords

Fabry-Perot resonators; alumina; annealing; diffraction gratings; erbium; focused ion beam technology; integrated optics; laser cavity resonators; microcavities; milling; nanofabrication; nanophotonics; nanostructured materials; optical fabrication; optical waveguide components; solid lasers; waveguide lasers; Al₂O₃:Er³⁺; Fabry-Perot microcavity fabrication; annealing; channel waveguide lasers; focused ion beam milling; on-chip resonator nanostructures; rare-earth-ion-doped active waveguides; reflection grating; Aluminum oxide; Gratings; Ion beams; Milling; Nanostructures; Optical reflection; Optical resonators; Optical waveguides; Particle beam optics; Waveguide lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE

Conference_Location

Belek-Antalya

ISSN

1092-8081

Print_ISBN

978-1-4244-3680-4

Electronic_ISBN

1092-8081

Type

conf

DOI

10.1109/LEOS.2009.5343113

Filename

5343113