DocumentCode
2532587
Title
A submersible piezoresistive MEMS lateral force sensor for cellular biomechanics applications
Author
Gnerlich, M. ; Perry, S.F. ; Tatic-Lucic, S.
Author_Institution
Lehigh Univ., Bethlehem, PA, USA
fYear
2011
fDate
5-9 June 2011
Firstpage
2207
Lastpage
2210
Abstract
A submersible lateral force sensor has been developed as part of an integrated MEMS chip for cell biomechanics experiments with forces below 100 nN. The piezoresistive elements in the sensor are defined by a single mask on an SOI wafer without the need for a doping or annealing step, and are easily integrated into other SOI MEMS. We examine the optimal design of this force sensor, as well as characterization results from fabricated devices.
Keywords
annealing; bioMEMS; biomechanics; biosensors; cellular biophysics; doping; force sensors; masks; microfabrication; microsensors; piezoresistive devices; silicon-on-insulator; SOI wafer; annealing; cellular biomechanics applications; doping; lateral force sensor; mask; piezoresistive elements; submersible piezoresistive MEMS; Bridge circuits; Force sensors; Piezoresistance; Sensitivity; Signal to noise ratio; Stress; Structural beams; MEMS; cell mechanics; force sensor; piezoresistor;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969365
Filename
5969365
Link To Document