Title :
A submersible piezoresistive MEMS lateral force sensor for cellular biomechanics applications
Author :
Gnerlich, M. ; Perry, S.F. ; Tatic-Lucic, S.
Author_Institution :
Lehigh Univ., Bethlehem, PA, USA
Abstract :
A submersible lateral force sensor has been developed as part of an integrated MEMS chip for cell biomechanics experiments with forces below 100 nN. The piezoresistive elements in the sensor are defined by a single mask on an SOI wafer without the need for a doping or annealing step, and are easily integrated into other SOI MEMS. We examine the optimal design of this force sensor, as well as characterization results from fabricated devices.
Keywords :
annealing; bioMEMS; biomechanics; biosensors; cellular biophysics; doping; force sensors; masks; microfabrication; microsensors; piezoresistive devices; silicon-on-insulator; SOI wafer; annealing; cellular biomechanics applications; doping; lateral force sensor; mask; piezoresistive elements; submersible piezoresistive MEMS; Bridge circuits; Force sensors; Piezoresistance; Sensitivity; Signal to noise ratio; Stress; Structural beams; MEMS; cell mechanics; force sensor; piezoresistor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969365
