DocumentCode :
2532598
Title :
Using insolubility wave-front for polymer deposition on self-assembling microfabricated parts
Author :
Morris, Christopher J. ; Ho, Harvey ; Parviz, Babak A.
Author_Institution :
Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA
fYear :
2005
fDate :
24-27 July 2005
Firstpage :
223
Lastpage :
227
Abstract :
Many low temperature techniques exist for the deposition of polymer material. However, existing techniques require macroscopic substrates and are therefore inadequate for small, released microfabricated parts. We present a method for depositing material on microparts or substrates which utilizes a macroscopic solubility change to induce microscopic precipitation and selective deposition. Selectivity was achieved by modification of surface energy using self-assembled monolayers. We term this method insoluble liquid energy minimization, or ILEM. Macroscale substrates were used to characterize ILEM, and the method was applied to 20-100 μm-sized microfabricated parts which self-assembled into three-dimensional microstructures.
Keywords :
liquid phase deposition; monolayers; polymers; precipitation; self-assembly; solubility; surface energy; 20 to 100 micron; 3D microstructures; insolubility wave-front; insoluble liquid energy minimization; macroscopic solubility; macroscopic substrates; microfabricated parts; microscopic precipitation; polymer deposition; polymer material; self-assembled monolayers; surface energy; Assembly; Gold; Liquids; Microscopy; Microstructure; Plasma temperature; Polymer films; Printing; Self-assembly; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
Type :
conf
DOI :
10.1109/ICMENS.2005.130
Filename :
1540822
Link To Document :
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