DocumentCode
2532637
Title
MEMS relays/switches
Author
Zhou, Tiansheng ; Loke, Yan
Author_Institution
Micralyne Inc., Edmonton, Alta., Canada
fYear
2005
fDate
24-27 July 2005
Firstpage
235
Lastpage
236
Abstract
This paper summarizes the design, microfabrication, simulation and characterization of MEMS relays. The lateral electrostatic driven relay has advantages of simple design and easy microfabrication, low voltage actuation, combination of micro relays to extend their electrical power handling as well as very low coupling loss for RF signal applications.
Keywords
microrelays; MEMS relays; MEMS switches; RF signal applications; coupling loss; electrical power; lateral electrostatic driven relay; microfabrication; microrelays; voltage actuation; Circuits; Contacts; Electrodes; Micromechanical devices; Relays; Silicon; Sputter etching; Switches; Wafer bonding; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.7
Filename
1540825
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