Title :
MEMS relays/switches
Author :
Zhou, Tiansheng ; Loke, Yan
Author_Institution :
Micralyne Inc., Edmonton, Alta., Canada
Abstract :
This paper summarizes the design, microfabrication, simulation and characterization of MEMS relays. The lateral electrostatic driven relay has advantages of simple design and easy microfabrication, low voltage actuation, combination of micro relays to extend their electrical power handling as well as very low coupling loss for RF signal applications.
Keywords :
microrelays; MEMS relays; MEMS switches; RF signal applications; coupling loss; electrical power; lateral electrostatic driven relay; microfabrication; microrelays; voltage actuation; Circuits; Contacts; Electrodes; Micromechanical devices; Relays; Silicon; Sputter etching; Switches; Wafer bonding; Wet etching;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.7
