• DocumentCode
    2532687
  • Title

    Advanced MEMS for high power integrated distribution systems

  • Author

    Kasim, Rahim ; Kim, Bruce C. ; Drobnik, Josef

  • Author_Institution
    Arizona State Univ., AZ, USA
  • fYear
    2005
  • fDate
    24-27 July 2005
  • Firstpage
    247
  • Lastpage
    252
  • Abstract
    This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.
  • Keywords
    circuit breakers; microswitches; power distribution; MEMS switches; MxN array; circuit breaker; high power integrated distribution systems; magnetic field; Bridge circuits; Circuit breakers; Coils; Magnetic fields; Magnetic switching; Micromechanical devices; Microswitches; Nickel; Permanent magnets; Switches; MEMS; MEMS Circuit breaker; power distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
  • Print_ISBN
    0-7695-2398-6
  • Type

    conf

  • DOI
    10.1109/ICMENS.2005.21
  • Filename
    1540828