DocumentCode
2532687
Title
Advanced MEMS for high power integrated distribution systems
Author
Kasim, Rahim ; Kim, Bruce C. ; Drobnik, Josef
Author_Institution
Arizona State Univ., AZ, USA
fYear
2005
fDate
24-27 July 2005
Firstpage
247
Lastpage
252
Abstract
This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.
Keywords
circuit breakers; microswitches; power distribution; MEMS switches; MxN array; circuit breaker; high power integrated distribution systems; magnetic field; Bridge circuits; Circuit breakers; Coils; Magnetic fields; Magnetic switching; Micromechanical devices; Microswitches; Nickel; Permanent magnets; Switches; MEMS; MEMS Circuit breaker; power distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.21
Filename
1540828
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