Measurements with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine

A nanopositioning and -measuring machine (NMM) was developed at the Institute of Measurement and Sensor Technology. It offers a movement range of 25 mm×25 mm×5 mm with a resolution of 0.1 nm. To use the NMM as an instrument to measure micro- and nanostructures on small objects a commercial atomic force microscope (AFM) was integrated. An ULTRAObjective standard by Surface Imaging Systems Germany was used for this. Extensive measurements were carried out to test the metrological characteristics of the system. Different measuring modes showed a big influence on the achieved results.